High aspect ratio polyimide etching using an oxygen plasma generated by electron cyclotron resonance source
- 1 January 1994
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 12 (1) , 422-426
- https://doi.org/10.1116/1.587138
Abstract
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