Slip line free silicon in large-area multiple-scan annealing with a line-focused electron beam
- 16 March 1982
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 70 (1) , K63-K65
- https://doi.org/10.1002/pssa.2210700156
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Kinetics of scanned electron beam annealing of high-energy as ion implanted siliconPhysica Status Solidi (a), 1981
- Heat transfer model for cw laser material processingJournal of Applied Physics, 1980