Combined calculation of lens aberrations, space charge aberrations, and statistical Coulomb effects in charged particle optical columns
- 1 November 1996
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 14 (6) , 3747-3752
- https://doi.org/10.1116/1.588661
Abstract
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