Soft x-ray W/Be multilayer and its application to a diffraction grating Yuichi,Utsumi
- 1 July 1989
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 60 (7) , 2024-2026
- https://doi.org/10.1063/1.1140866
Abstract
Tungsten/beryllium multilayers were coated onto lamellar diffraction gratings using a neutral atom beam sputtering technique. Boundary roughness of the multilayer was estimated to be 6.0 Å as a standard deviation. Diffraction efficiency of the multilayer‐coated grating was measured using monochromatized synchrotron radiation.Keywords
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