Precision molecular flow measurement and control for single and multigas systems

• 1 March 1978
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 15  (2) , 771-774
• https://doi.org/10.1116/1.569511

Abstract

Keywords

• MEASUREMENT AND CONTROL
• MULTIGAS SYSTEMS
• PRECISION MOLECULAR FLOW
• MOLECULAR FLOW MEASUREMENT