Thermal and mechanical coupling between successive pulses in KrF-excimer-laser ablation of polyimide

• 27 February 1996
• journal article
• research article
• Published by Springer Nature in Applied Physics A
• Vol. 62  (3) , 203-211
• https://doi.org/10.1007/s003390050286

Abstract

Keywords

• 81.40
• 81.60
• 72.60