R.F. sputtered silicon films on sapphire
- 1 February 1976
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 32 (1) , 55-59
- https://doi.org/10.1016/0040-6090(76)90554-x
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Silicon homoepitaxy with ion sputtering. I. Mechanism of growthPhysica Status Solidi (a), 1973
- Ion beam sputtering and its application for the deposition of semiconducting filmsThin Solid Films, 1972
- Silicon-on-Sapphire Epitaxy by Vacuum Sublimation: LEED–Auger Studies and Electronic Properties of the FilmsJournal of Vacuum Science and Technology, 1971
- Epitaxial Deposition of Germanium by Both Sputtering and EvaporationJournal of Applied Physics, 1966