Slotted Waveguide Field Applicator for the Generation of Long Uniform Plasmas
- 1 January 1993
- journal article
- research article
- Published by Taylor & Francis in Journal of Microwave Power and Electromagnetic Energy
- Vol. 28 (3) , 123-131
- https://doi.org/10.1080/08327823.1993.11688214
Abstract
This paper reports the experimental study of a small width, long microwave field applicator used to sustain long, axially uniform gaseous discharges as required in various applications. Based on an array of slots in the wide wall of a WR-430 waveguide, this applicator was described earlier by Ji and Gerling [1988] who performed low-power simulating tests under free-space conditions. The present investigation includes low-power measurements as well as experiments in an actual discharge setup. It is shown that even a simple structure with no adjustable elements can assure an efficient power transfer to plasma and good axial uniformity. Indications for the design and efficient use of the applicator are also given.Keywords
This publication has 1 reference indexed in Scilit:
- Design considerations for RF pumping of rare gas halide lasersAIP Conference Proceedings, 1983