Thick film PZT/micromachined siliconaccelerometer
- 11 November 1999
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 35 (23) , 2060-2062
- https://doi.org/10.1049/el:19991398
Abstract
A novel accelerometer fabricated by a combination of screen-printing and silicon micromachining is reported. This is the first device of its kind fabricated in this manner. Initial results indicate a sensitivity of 16 pCg-1 which compares very favourably with a sensitivity of 0.15 pCg-1 reported for thin-film devices.Keywords
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