Development of the micromilling process for high-aspect-ratio microstructures
- 1 March 1996
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 5 (1) , 33-38
- https://doi.org/10.1109/84.485213
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Published by American Vacuum Society ,1994
- High-resolution focused ion beamsReview of Scientific Instruments, 1993
- Energy Dissipation in the Ultraprecision Machining of CopperCIRP Annals, 1991