Comparative study of low temperature poly-Si TFTs obtained by various crystallization techniques for use in active matrix LCDs
- 1 September 1992
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 19 (1-4) , 97-100
- https://doi.org/10.1016/0167-9317(92)90400-l
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Low Thermal Budget Poly-Si Thin Film Transistors on GlassJapanese Journal of Applied Physics, 1991