Spectra Associated with Stacking Faults in 4H-SiC Grown in a Hot-Wall CVD Reactor

• 1 April 2002
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 389-393, 589-592
• https://doi.org/10.4028/www.scientific.net/msf.389-393.589

Abstract

Keywords

• HOT-WALL CVD
• PHOTOLUMINESCENCE (PL)
• POLYTYPE
• STACKING FAULT