Deposition of Ba_1−xSr_xTiO₃ and SrTiO₃ via liquid source CVD (LSCVD) for ULSI DRAMS

This publication has 2 references indexed in Scilit:

• Barrier layers for realization of high capacitance density in SrTiO3 thin-film capacitor on silicon
  Applied Physics Letters, 1990
• Dielectric properties of the Ba1−xSrxTiO3 system
  Materials Letters, 1988