Air‐Microwave Plasma Etching of Polycrystalline Diamond Thin Films

• 1 July 1992
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 139  (7) , 1988-1993
• https://doi.org/10.1149/1.2069533

Abstract

Keywords

• THIN FILM
• PLASMA ETCHING