Photolithography on micromachined 3D surfaces using electrodeposited photoresists

• 1 October 1995
• journal article
• Published by Elsevier in Sensors and Actuators A: Physical
• Vol. 51  (1) , 51-54
• https://doi.org/10.1016/0924-4247(96)80052-5

Abstract

Keywords

• PHOTOLITHOGRAPHY
• ELECTRODEPOSITED PHOTORESISTS
• MICROMACHINING