A system for vacuum gauge calibration using the comparison technique

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Abstract
A system for calibrating vacuum gauges in the range 10−4 to 102 Pa with an estimated uncertainty of ±8% is described. The factors affecting the design of the calibration vessel are discussed and the performance of the system enumerated. The reference gauges used are triode ionization gauges and a capacitance manometer. The reproducibilities of the reference gauges are estimated together with the other factors which contribute to the total uncertainty attached to a calibration performed on the system.

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