Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals, and Devices
- 21 March 1993
- report
- Published by Defense Technical Information Center (DTIC)
Abstract
The main objective of the Institute was to bring together scientists from different fields of research such as semiconductor, oxide, and metallic materials, as well as those working on the development of systems for thin film processing and characterization. The highly interdisciplinary nature of the Institute allowed participant scientists to interchange ideas in an environment rarely available in other international conferences. This has opened a window of opportunities for collaborations in research and development, which more and more will require interdisciplinary exchange of ideas.Keywords
This publication has 0 references indexed in Scilit: