Thermocurable polymers as resists for imprint lithography
- 25 May 2000
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 36 (11) , 983-984
- https://doi.org/10.1049/el:20000708
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Versatile patterning process for semiconductorsbased on microcontact printingElectronics Letters, 1999
- Features of gold having micrometer to centimeter dimensions can be formed through a combination of stamping with an elastomeric stamp and an alkanethiol ‘‘ink’’ followed by chemical etchingApplied Physics Letters, 1993