Plasma Etching of Titanium for Application to the Patterning of Ti‐Pd‐Au Metallization
- 1 November 1977
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 124 (11) , 1766-1771
- https://doi.org/10.1149/1.2133153
Abstract
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