An analysis of the in-plane acceleration sensitivity of ST-cut quartz surface wave resonators with the substrate extending beyond the supports
- 6 January 2003
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 230-238
- https://doi.org/10.1109/freq.1988.27608
Abstract
For this support configuration a small amount of flexure occurs in the active substrate for the case of in-plane acceleration, so the dominant extensional biasing state is found first and used to define conservatively the flexural biasing state. The calculated results show that very low (less than a few parts in 10/sup 11/) in-plane acceleration sensitivities can be obtained, and since the normal acceleration sensitivity can readily be made to vanish, very low resultant acceleration sensitivities can be achieved with this support configuration.<>Keywords
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