Monolithic Resonant-Cantilever-Based CMOS Microsystem for Biochemical Sensing
- 18 April 2008
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Circuits and Systems I: Regular Papers
- Vol. 55 (9) , 2551-2560
- https://doi.org/10.1109/tcsi.2008.922027
Abstract
A resonant cantilever-based microsystem aimed at biochemical sensing is presented. The sensor system comprises a magnetically actuated resonant cantilever sensor array integrated with the feedback circuitry, digital control circuitry and a serial interface on a single chip in 0.8 mum CMOS technology. The sensor system shows a frequency stability of better than 3 Hz in water corresponding to a detection limit of about 30 pg mass loading. The system has been used for the detection of antibody-antigen interaction on the cantilever surface. The possibility to actuate and operate cantilever arrays in a liquid environment opens up a variety of new applications for bio-chemical sensing.Keywords
This publication has 17 references indexed in Scilit:
- Integrated cantilever sensors with a torsional resonance mode for ultraresoluble on-the-spot bio/chemical detectionApplied Physics Letters, 2007
- Fully integrated cmos resonant cantilever sensor for bio-chemical detection in liquid environmentsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Dynamic Microcantilever Sensors for Discerning Biomolecular InteractionsAnalytical Chemistry, 2005
- Fully differential variable gain instrumentation amplifier based on a fully differential DDA topologyPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Peer Reviewed: Microcantilever Transducers: A new Approach in Sensor TechnologyPublished by American Chemical Society (ACS) ,2002
- A linear MOS transconductor using source degeneration and adaptive biasingIEEE Transactions on Circuits and Systems II: Analog and Digital Signal Processing, 2001
- Highly linear voltage-controlled CMOS transconductorsIEEE Transactions on Circuits and Systems I: Regular Papers, 1993
- Linear transconductor based on crosscoupled CMOS pairsElectronics Letters, 1991
- A 4-MHz CMOS continuous-time filter with on-chip automatic tuningIEEE Journal of Solid-State Circuits, 1988
- A versatile building block: the CMOS differential difference amplifierIEEE Journal of Solid-State Circuits, 1987