Thin-film circuit technology: Part I — Thin-film R-C networks
- 1 April 1964
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Spectrum
- Vol. 1 (4) , 72-80
- https://doi.org/10.1109/mspec.1964.6500525
Abstract
Miniaturization requirements have brought about the integral fabrication of many components. The thin-film approach permits the integration of numerous precision circuit elements and their interconnections. Part I of this three-part series deals mainly with the two deposition techniques of cathode sputtering and vacuum evaporation, and with their use in the fabrication of film resistors, capacitors, and R-C networks. Subsequent articles will discuss thin-film transistors and cryogenic thin films Part I — Thin-film R-C networksKeywords
This publication has 0 references indexed in Scilit: