Electroacoustic model for electrostatic ultrasonic transducers with V-grooved backplates
- 1 January 1995
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
- Vol. 42 (1) , 1-7
- https://doi.org/10.1109/58.368320
Abstract
Capacitive ultrasonic transducers are widely used to generate airborne ultrasound. This paper presents an equivalent circuit for an electrostatic transducer with a V-grooved backplate. The comparison between simulation results and measurements on a prototype transducer shows that the model gives reliable results. This model is useful in many applications, for example to simulate sensors in a robot and to design ultrasonic transducer systems.<>Keywords
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