Bistable fluidic elements in LIGA technique for flow control in fluidic microactuators
- 1 May 1994
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 43 (1-3) , 330-334
- https://doi.org/10.1016/0924-4247(93)00708-c
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Microrobots and micromechanical systemsSensors and Actuators, 1989
- Silicon as a mechanical materialProceedings of the IEEE, 1982