Abstract
Acoustic surface waves (ASW) scattered at a region with density and elastic parameter variations are studied in view of the newly developed techniques to fabricate ASW reflectors by ion implantation and metal impurity diffusion. The scattering problem is formulated in a perturbation theory. The first‐order vector equation and the solution are obtained in terms of a source which is due to the interaction of the incident wave and the material perturbation. An example is given to illustrate the application of the theory. Results are found to agree closely with experimental observation.

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