Sputtering of Si with keV Ar+Ions. I. Measurement and Monte Carlo Calculations of Sputtering Yield
- 1 September 1979
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 18 (9) , 1717-1725
- https://doi.org/10.1143/jjap.18.1717
Abstract
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