Application of neural networks to plasma etch end point detection

• 1 January 1996
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 14  (1) , 498-503
• https://doi.org/10.1116/1.588503

Abstract

Keywords

• NEURAL NETWORKS
• ETCH END
• PLASMA ETCH
• POINT DETECTION
• APPLICATION OF NEURAL