Alkylsilane Self-Assembled Monolayer Photolithography: Effects of Proximity Gap on Photodegradation and Patterning Resolution
- 1 April 2003
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 42 (Part 2, No) , L394-L397
- https://doi.org/10.1143/jjap.42.l394
Abstract
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