Open silicon stencil masks for demagnifying ion projection

• 31 December 1987
• journal article
• Published by Elsevier in Microelectronic Engineering
• Vol. 6  (1-4) , 333-342
• https://doi.org/10.1016/0167-9317(87)90057-8

Abstract

Keywords

• OPEN SILICON STENCIL MASK
• ION PROJECTION