Using Membrane Mirrors In Adaptive Optics

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Abstract
This paper describes the utilization of very thin, electrostatically deflected membranes as an active optic in an image compensation system. The key design considerations are given in terms of deflections, frequency response, and drive signals. The advantages of a membrane are given in terms of its transfer characteristics, low voltages, zero hysteresis and its ability to accommodate hundreds of actuators. Pertinent performance data is presented. This paper also discusses the manufacturing techniques that are used to generate membrane mirrors of different materials, thicknesses, and geometries. The manufacturing technique is relatively simple and inexpensive and leads to a rugged active optic that is ideal for use in an image compensation system, where the correction of many waves is required.

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