Energetics of microvoid formation in Si from supersaturated vacancies

• 21 August 1995
• journal article
• Published by AIP Publishing in Applied Physics Letters
• Vol. 67  (8) , 1063-1065
• https://doi.org/10.1063/1.114465

Abstract

Keywords

• SILICON
• CRYSTAL GROWTH
• VOIDS
• VACANCIES
• FORMATION HEAT
• FREE ENERGY
• NUCLEATION