EPR DEFECTS AND INTERFACE STATES ON OXIDIZED (111) AND (100) SILICON
- 1 January 1980
- book chapter
- Published by Elsevier
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
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- Dependence of Interface State Density on Silicon Thermal Oxidation Process VariablesJournal of the Electrochemical Society, 1979
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- Low-Temperature EPR Measurements onin situVacuum-Cleaved SiliconPhysical Review Letters, 1975
- Observation and analysis of the primary 29Si hyperfine structure of the E′ center in non-crystalline SiO2Solid State Communications, 1974
- Study of Silicon-Silicon Dioxide Structure by Electron Spin Resonance IJapanese Journal of Applied Physics, 1971