Processing monolithic silicon integrated circuits
- 1 January 1966
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics & Power
- Vol. 12 (9) , 323-327
- https://doi.org/10.1049/ep.1966.0246
Abstract
An s.i.c. (silicon integrated circuit) is basically a small encapsulated chip of silicon containing a group of interconnected p-n junctions. This article explains how such junctions are produced by epitaxial deposition and by diffusion.Keywords
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