Effect of Mg diffusion on Ti-diffused LiNbO3 waveguides

Abstract
A method for compensation of the index increment yielded by Li out‐diffusion during Ti diffusion for the LiNbO3waveguide formation is presented. Mgdiffusion decreases the extraordinary refractive index, and its diffusion rate is far faster than that of Ti diffusion. An appropriate Mgdiffusion condition is determined for eliminating the Li out‐diffusion influence. Excellent optical confinement in the Ti‐diffused LiNbO3 Y‐cut strip waveguide is demonstrated with Mgdiffusion.