A mass spectrometric investigation of the plasma polymerization of methyltrimethoxysilane in an r.f. discharge
- 23 October 1981
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 84 (4) , 401-407
- https://doi.org/10.1016/0040-6090(81)90178-4
Abstract
No abstract availableKeywords
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