A multi-level, LIGA-like process for three dimensional actuators

Publisher Website

23 December 2002

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

https://doi.org/10.1109/memsys.1996.493995

Abstract

No abstract available

This publication has 2 references indexed in Scilit:

Fabrication of assembled micromechanical components via deep X-ray lithography
Published by Institute of Electrical and Electronics Engineers (IEEE) ,2002
Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)
Microelectronic Engineering, 1986