Electron swarm parameters in SiH4-Ar mixtures

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Abstract
Electron swarm parameters (the drift velocity and the longitudinal diffusion coefficient) in SiH4-Ar mixtures containing 0.501% and 5.04% monosilane were measured using a double-shutter drift tube over the range of E/N from 0.06 to 140 Td at room temperature. Electron swarm parameters in argon were drastically changed by adding a small amount of monosilane. The electron drift velocity in both mixtures showed unusual behaviour against E/N. It had negative slope in the medium range of E/N, yet the slope was not smooth but contained a small hump. The longitudinal diffusion coefficient also showed a corresponding feature in its dependence on E/N.