Birefringence control in plasma-enhanced chemical vapor deposition planar waveguides by ultraviolet irradiation
- 20 August 2000
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 39 (24) , 4296-4299
- https://doi.org/10.1364/ao.39.004296
Abstract
Complete birefringence compensation is demonstrated in plasma-enhanced chemical vapor deposition waveguides by 193-nm postexposure. A single relaxation process dominates the decay in stress anisotropy, indicating that compressive stress from the substrate leads to an elastic stress anisotropy at the core.Keywords
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