Excimer Lasers: Current Trends And Future Directions
- 1 June 1989
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- Vol. 1041, 186-193
- https://doi.org/10.1117/12.951247
Abstract
This paper discusses the design and performance of a new excimer laser. The laser delivers output powers as high as 160 Watts on KrF with an efficiency of 4.5%, and has demonstrated gas lifetimes significantly better than any previously reported for high-power, commercial lasers. Details are given of an apparatus designed to determine the impurities which presently limit gas lifetime in excimer lasers.Keywords
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