Nonoxide Chalcogenide Glass Films for Integrated Optics

Abstract
We report the waveguiding properties of sputtered films of three chalcogenide glasses: As2S3, Ge28Sb12Se60, and Ge33As12Se55, at 1.064 μm. Propagation losses of less than 1 dB/cm have been measured for As2S3 films. Delineated guides, as well as films, have been made and studied.

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