Effect of lanthanum doping on the electrical properties of sol-gel derived ferroelectric lead–zirconate–titanate for ultra-large-scale integration dynamic random access memory applications
- 1 July 1993
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 11 (4) , 1302-1309
- https://doi.org/10.1116/1.586933
Abstract
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