UV–Ozone Cleaning of GaAs for MBE

Publisher Website

1 February 1982

journal article
Published by American Vacuum Society in Journal of Vacuum Science and Technology

Vol. 20 (2) , 241-242
https://doi.org/10.1116/1.571365

Abstract

A simple method of removing carbon contamination from GaAs substrates using exposure to ozone and ultraviolet light is described.

Keywords