Fabrication and characterization of single-electron transistors and traps

• 1 November 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 12  (6) , 3619-3622
• https://doi.org/10.1116/1.587625

Abstract

Keywords

• SINGLE ELECTRON TRANSISTORS
• FABRICATION
• CHARACTERIZATION OF SINGLE
• TRANSISTORS AND TRAPS