Wet anisotropic etching for fluidic 1D nanochannels
- 13 June 2003
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 13 (4) , S62-S66
- https://doi.org/10.1088/0960-1317/13/4/310
Abstract
No abstract availableKeywords
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