A novel accelerometer based on a silicon thermopile
- 9 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- A review of low cost accelerometers for vehicle dynamicsSensors and Actuators A: Physical, 1990
- Integrated vacuum sensorSensors and Actuators, 1985
- Design optimization for cantilever-type accelerometersSensors and Actuators, 1984
- A micromechanical capacitive accelerometer with a two-point inertial-mass suspensionSensors and Actuators, 1983
- Micromechanical accelerometer integrated with MOS detection circuitryIEEE Transactions on Electron Devices, 1982