Luminescence spectroscopy of dry etched single dots and wires

• 1 November 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 12  (6) , 3658-3662
• https://doi.org/10.1116/1.587634

Abstract

Keywords

• LUMINESCENCE SPECTROSCOPY
• SINGLE DOTS
• WIRES
• SPECTROSCOPY OF DRY
• DRY ETCHED SINGLE