Preparation and Properties of SiO2 Films from SiH4 ‐ CO 2 ‐ H 2

• 1 January 1976
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 123  (1) , 111-117
• https://doi.org/10.1149/1.2132741

Abstract