Probabilistic Weibull behavior and mechanical properties of MEMS brittle materials
- 31 December 2002
- journal article
- conference paper
- Published by Springer Nature in Journal of Materials Science
- Vol. 38 (20) , 4087-4113
- https://doi.org/10.1023/a:1026317303377
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Fracture strength of polysilicon at stress concentrationsJournal of Microelectromechanical Systems, 2003
- Mechanism of fatigue in micron-scale films of polycrystalline silicon for microelectromechanical systemsApplied Physics Letters, 2002