Oxidation Stacking Faults in SIMOX and Silicon‐on‐Insulator Structures Obtained by Wafer‐Bonding
- 1 February 1993
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 140 (2) , 544-548
- https://doi.org/10.1149/1.2221085
Abstract
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