The evaluation of some disorder parameters of RF glow discharge hydrogenated amorphous carbon films a-C:H
- 14 June 1988
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 21 (6) , 995-998
- https://doi.org/10.1088/0022-3727/21/6/021
Abstract
The fundamental optical absorption edge of RF glow discharge hydrogenated amorphous carbon films a-C:H is studied by direct optical transmission spectroscopy. It is observed that the optical energy gap EG decreases and an Urbach slope parameter epsilon 0 increases when the substrate temperature Ts increases. These results are correlated with ESR data and data on the density of states at the Fermi level N(EF) obtained from DC conductivity measurements. As one of the possible explanations of the above effects, the effective medium approximation model (EMA) was used.Keywords
This publication has 25 references indexed in Scilit:
- Optical and mobility (electrical) gaps of arc evaporated hydrogenated amorphous carbon filmsPhysica Status Solidi (a), 1987
- Investigation of hydrocarbon-plasma-generated carbon films by electron-energy-loss spectroscopyPhysical Review B, 1984
- Bonding in hydrogenated hard carbon studied by optical spectroscopySolid State Communications, 1983
- Hard carbon coatings with low optical absorptionApplied Physics Letters, 1983
- Recombination centers in phosphorous doped hydrogenated amorphous siliconSolid State Communications, 1982
- Diamond-like carbon films produced in a butane plasmaThin Solid Films, 1979
- The electrical and optical properties of amorphous carbon prepared by the glow discharge techniquePhilosophical Magazine, 1977
- The deposition of hard surface layers by hydrocarbon cracking in a glow dischargeThin Solid Films, 1976
- Conduction in non-crystalline systems V. Conductivity, optical absorption and photoconductivity in amorphous semiconductorsPhilosophical Magazine, 1970
- Amorphous Versus Crystalline GeTe Films. II. Optical PropertiesJournal of Applied Physics, 1969